The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2000
Filed:
Mar. 05, 1998
Tomio Endo, Hidaka, JP;
Olympus Optical Co., Ltd., Tokyo, JP;
Abstract
A phase interference microscope, comprising a light source for emitting coherent light with a constant wavelength, an interference optical system for splitting the light emitted from the light source into two light beams, irradiating one of the split light beams onto a sample and the other split light beam onto a reference mirror, and making the light beam reflected from the sample interfere with the light beam reflected from the reference mirror, a focusing device for recognizing a position of a middle point in a phase anomaly of interference light generated in the vicinity of a focusing point as a focusing point for the sample, and moving the sample to the focusing position, and a size measurement device for measuring a size of the sample on the basis of the interference light.