The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 01, 2000

Filed:

Feb. 27, 1998
Applicant:
Inventors:

Shouji Yajima, Sagamihara, JP;

Hiroki Jinbo, Kawasaki, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03B / ; C03B / ; C03B / ; C03B / ; C03B / ;
U.S. Cl.
CPC ...
65 2912 ; 65 2912 ; 65 174 ; 65384 ; 65414 ;
Abstract

A method for manufacturing quartz glass in a flame hydrolysis reaction inside a furnace, including the steps of mixing a gas containing Si, a combustion-supporting gas, and a combustible gas and discharging this mixed gas from a burner; producing a quartz glass powder by causing the mixed and discharged gases to react in a flame within the furnace while an opening area of an opening and shutting system of the furnace is controlled; and producing a quartz glass ingot by depositing and vitrifying the quartz glass powder on a target surface facing an interior of the furnace, wherein said producing step includes the step of controlling the opening area of the opening and shutting system of the furnace in accordance with the amount of growth of the ingot on the target surface.


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