The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2000
Filed:
Jan. 06, 1999
Applicant:
Inventor:
Douglas N Berger, Kennewick, WA (US);
Assignee:
Integrated Environmental Technologies, LLC, Richland, WA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
373 95 ; 373100 ;
Abstract
An apparatus for feeding electrodes into a process chamber is disclosed. The apparatus is designed to maintain the atmosphere within the process chamber as separate from the atmosphere surrounding the process chamber. The apparatus has an air-tight tube having at least two internal sealing mechanisms, an outer sealing mechanism and an inner sealing mechanism, sealing mechanisms separated by an expandable section of the tube; penetration in the tube for the introduction of a purge gas in between the inner and outer sealing mechanisms; and an electrical contact for transmitting electrical power to the electrode.