X-y table having belt drives for moving a stage of the table in fine

Abstract

An X-Y table of a microscope includes an a X-axis moving plate, an object holder mounted on an upper surface of the X-axis moving plate, a Y-axis moving plate to which the X-axis moving plate is slidingly coupled for movement in the X direction, a fixed plate to which the Y-axis moving plate is slidingly coupled for movement in the Y direction, an X-axis driving system which uses a belt for moving the X-axis moving plate in the X direction, and Y-axis driving system which also uses a belt for moving the Y-axis moving plate in the Y direction. The X-axis moving plate and the Y-axis moving plate serve as the stage of the microscope. In operation, when it is desired to move the X- and Y-moving plates rapidly to generally position the object under the microscope, the belts of the X- and Y-driving systems are disengaged from drive elements associated therewith. Without the belts being engaged, the X and Y plates can thus travel quickly and smoothly and, without abrasion occurring between the belts and their associated drive elements. On the other hand, when the X- and Y-moving plates are to be moved in fine uniform increments to precisely position the object held by the object holder, the belts are engaged and are used to move the plates slowly to precisely position the object under the microscope.