The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2000
Filed:
Oct. 20, 1997
Shinji Mizutani, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An alignment device which may include an objective optical system for detecting the light from a first mark formed, for alignment, in a first mark area on a substrate and the light from a second mark formed, for alignment, in a second mark area, a first detection optical system having a first detection area within the viewing field of the objective optical system and adapted to detect the light from the first mark through the objective optical system, a second detection optical system having a second detection area, different from the first detection area, within the viewing field of the objective optical system and adapted to detect the light from the second mark through the objective optical system, and a focus detection system for detecting the deviation of the first mark area with respect to the focal plane of the first detection optical system and the deviation of the second mark area with respect to the focal plane of the second detection optical system, by irradiating the first and second detection areas respective with light beams and receiving the reflected lights therefrom.