The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2000
Filed:
Apr. 09, 1997
Toshiya Ohtomo, Tokyo, JP;
Yutaka Hayashi, Kanagawa-ken, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A movable mirror supporting mechanism for supporting a movable mirror forming a part of an interferometric measurement system and having a rectangular cross-section onto an object, with a reflecting surface of said movable mirror being arranged normal to a measuring direction. The movable mirror supporting mechanism includes at least two fixtures for securing the movable mirror from above onto respective movable mirror supporting portions provided on the object. Positions on the movable mirror at which the movable mirror is secured onto the measuring object by the fixtures are defined to be out of that area of the reflecting surface of the movable mirror which is utilized for interferometric measurement.