The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2000
Filed:
Dec. 05, 1997
Applicant:
Inventors:
Stephen D Horton, Pleasanton, CA (US);
Theodros W Mariam, San Jose, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; H01L / ;
U.S. Cl.
CPC ...
438 17 ;
Abstract
In the processing and handling of semiconductor silicon wafers, blank silicon wafers are replaced by chemically inert wafers during setup, adjustment, and operation. The inert material wafers eliminate the breakage associated with blank, silicon wafers while helping to purge the semiconductor wafer processing equipment of particulate contaminates.
Horton, Stephen. (2000). Method for improving semiconductor wafer processing (U.S. Patent No. 6010916). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6010916
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile