The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 1999
Filed:
Dec. 03, 1998
Applicant:
Inventor:
Paul McKay Moore, San Bruno, CA (US);
Assignee:
National Semiconductor Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F / ; G02F / ; G03C / ;
U.S. Cl.
CPC ...
349139 ; 349156 ; 430311 ; 430319 ;
Abstract
An array of pixels in a liquid crystal silicon light valve are fabricated with a minimum of surface topology by forming raised dielectric spacer walls on an underlying array support surface prior to the deposition of the metal pixel electrode layer. Deposition of the metal pixel electrode layer, followed by chemical-mechanical polishing to stop on the top of the spacer walls, produces an electrode surface that is flush with the tops of the dielectric spacer walls. This resulting planarity in the surface of the pixel cell array minimizes surface topology exhibited by the array, maximizing reflectance of the light valve.