The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 1999
Filed:
Jan. 31, 1997
Applicant:
Inventors:
Matthew Isaac Haller, Mountain View, CA (US);
Butrus Thomas Khuri-Yakub, Palo Alto, CA (US);
Assignee:
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438 50 ; 438 53 ; 438 48 ; 216-2 ; 73777 ; 7351416 ;
Abstract
A method of fabrication wherein a nitride layer is spaced from a conductive substrate by an insulating layer and etching removes at least portions of an insulating layer to leave a nitride membrane spaced from the substrate. The surface of the conductive layer where the insulating layer is removed is chemically roughened and the etchant is removed by freeze-drying and sublimation to eliminate sticking of the nitride layer to the substrate surface during fabrication.