The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 1999
Filed:
Sep. 11, 1997
Fujikoki Corporation, Tokyo, JP;
Abstract
A pressure sensor prevents the occurrence of a large deformation or breakage of the diaphragm in a strain gage-type pressure sensor utilizing a thin plate-shaped insulating body as the diaphragm. The pressure sensor comprises an insulating diaphragm having a strain gage on its surface and a substrate positioned opposing the surface of the diaphragm on which the strain gage is mounted and kept a predetermined distance away from the surface. The diaphragm can be formed of material such as ceramic of alumina, zirconia or the like, silicon or crystal. The substrate can be formed of either the same material as the diaphragm, or the surface opposing the diaphragm can be formed of an insulator disposed on metal. The diaphragm and the substrate can be affixed using a low-melting glass.