The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 1999
Filed:
Mar. 13, 1998
Guillermo L Toro-Lira, Sunnyvale, CA (US);
Other;
Abstract
Transport of a workpiece into and out of high vacuum conditions is achieved using a vacuum handler having an ante-chamber which buffers a vacuum lock and other mechanically vulnerable components from high pressure differences. During loading of the workpiece, the ante-chamber is vented to atmospheric pressure while the vacuum lock door is sealed closed. The antechamber is then opened and receives the incoming workpiece from the exterior of the vacuum handler. The ante-chamber is then closed and evacuated to the pressure level of the vacuum lock, which is only opened once this pressure level is achieved. The vacuum lock receives the workpiece and is evacuated to the pressure of the main vacuum chamber of the vacuum handler and then opened thereto. An elevator assembly transports the workpiece into the vacuum chamber for processing. The process is reversed during unloading of the workpiece from the vacuum handler following processing completion.