The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 1999
Filed:
Jun. 20, 1997
Applicant:
Inventors:
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G02F / ;
U.S. Cl.
CPC ...
349 42 ; 438745 ;
Abstract
A method of manufacturing TFT array substrate comprises forming a control electrode and a control electrode line on a transparent insulating substrate, forming an insulating film on the control electrode and the control electrode line, forming a semiconductor layer through the insulating film on the control electrode and the control electrode line, forming a transparent conductive film on the insulating film, forming a picture element electrode by etching the transparent conductive film with an etchant including concentrated hydrochloric acid mixed with concentrated sulfuric acid and having water as main component, and forming a pair of electrodes on the semiconductor layer.