The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 1999
Filed:
Dec. 12, 1997
Applicant:
Inventors:
Paul J Steffan, Elk Grove, CA (US);
Ming Chun Chen, Irvine, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; H01L / ; G06K / ;
U.S. Cl.
CPC ...
324537 ; 324765 ; 438 17 ; 36446817 ; 382149 ; 702 35 ;
Abstract
A method to accurately classify defects on a semiconductor wafer wherein a scanning tool detects defects and assigns values to parameters that are characteristic of each defect. The values of the characteristic parameters represent a thumbprint of each defect and the defects are placed into 'bins' according to the thumbprint of each defect. A sample of defects in each bin is analyzed and assigned a classification code.