Semiconductor wet processing equipment having integrated input and

Abstract

Wet processing equipment automatically and rapidly unloads unit lots of semiconductor devices at an input port unit without any intervention of an operator in the event of an emergency, and thereby prevents unforeseen operational problems. The semiconductor wet processing equipment includes an emergency output port unit integral with the input port unit. The emergency output port unit will transfer lots directly from the loading position established by the input port unit and set the lots at an emergency unloading position when a predetermined condition occurs in the wet processing equipment. When such a condition occurs, a process canceling command is input from a host computer. If the process canceling command is input, the controller determines whether the lot is in a standby state at the loading position. If the lot is in the standby state, the process canceling command is downloaded into the processing equipment. Then a determination is made as to whether the lot has been unloaded from the input port unit onto the emergency output port unit. If the lot has been unloaded from the input port unit onto the emergency output port unit, an AGV operating command is downloaded into an AGV server.