The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 30, 1999

Filed:

Sep. 27, 1996
Applicant:
Inventors:

Philipp Niedermann, Neuchatel, CH;

Rainer F Christoph, Peseux, CH;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438 53 ; 438 50 ; 438 52 ;
Abstract

Process for manufacturing micromechanical components having a part made of diamond, consisting of at least one tip (3a), in which a substrate (8a) is prepared, in order to form an impression (13a) of the shape desired for the part made of diamond; the part made of diamond is produced by chemical vapor deposition of diamond in the impression and is then separated from the substrate. In order to produce the part made of diamond, a primary film of fine diamond particles, of diameter less than 10 nm, suitable to act as seeds for growth of the diamond are deposited on the substrate, on the surface of the impression (13a), before chemical vapor deposition; the diamond film is then grown by vapor deposition; and the substrate (8a) is then at least partly removed.


Find Patent Forward Citations

Loading…