The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1999
Filed:
Dec. 03, 1997
Applicant:
Inventors:
Masaya Hisamatsu, Kawasaki, JP;
Akio Hasebe, Nagahama, JP;
Tsutomu Murakami, Nara, JP;
Hirofumi Ichinose, Tokyo, JP;
Satoshi Shinkura, Nagahama, JP;
Yukie Ueno, Nara, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25F / ; C25F / ;
U.S. Cl.
CPC ...
205652 ; 205656 ; 205658 ; 205659 ; 205671 ; 205674 ; 2042 / ; 204272 ; 204273 ; 204289 ; 204292 ; 204293 ; 204294 ;
Abstract
An electrode structure is constituted by a first electrode, and at least one second electrode providing a pair of opposite portions with a prescribed spacing therebetween at which the first electrode is disposed. The electrode structure is suitably used for electrolytic etching and is effective in providing an accurate etching pattern without damaging the surface of an etching object.