The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1999
Filed:
Jul. 11, 1997
Applicant:
Inventor:
Yinshi Liu, Monroeville, PA (US);
Assignee:
Johnson Matthey Electronics, Inc., Spokane, WA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429812 ; 20429813 ; 148421 ; 148669 ;
Abstract
Described is a titanium sputtering target to provide improved step coverage and a method of making same.
Liu, Yinshi. (1999). Titanium sputtering target (U.S. Patent No. 5993621). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5993621
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile