Robot having multiple degrees of freedom in an isolated environment

Abstract

An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured to the upper flange by rigid members extending between the upper flange and the lower flange. The upper flange includes a bore therein. The elevator structure is positioned between the upper flange and the lower flange and itself includes an upper plate and a lower plate. The elevator structure coupled to the positioning arm structure through the bore in the upper flange. The elevator structure includes lead screw members having a respective upper end portion and a lower end portion, extending from the upper plate to the lower plate. In addition, the elevator structure includes a plurality of universal joints supported by the upper plate, one of said plurality of universal joints being associated with one of the lead screw members and being arranged to universally mount the upper plate to a respective lead screw. A seal structure is coupled to the upper flange and the upper plate, the seal structure isolating the upper flange from the elevator structure.