The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1999
Filed:
Mar. 13, 1997
Applicant:
Inventor:
Robert Peckman, Roanoke, VA (US);
Assignee:
ITT Manufacturing Enterprises, Wilmington, DE (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134-13 ; 134-1 ; 134902 ;
Abstract
A method of cleaning semiconductor wafers by use of a heat source external to the system is disclosed. The semiconductor wafers are disposed within a vacuum chamber having a transmissive window, and a radiant heat source external to the chamber is applied so that the radiation passes through the window onto the semiconductor wafers. The invention has particular application to semiconductor wafers used for photocathodes and image intensifier tubes.