The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 30, 1999

Filed:

Nov. 20, 1996
Applicant:
Inventors:

Michihiko Tsuruoka, Kanagawa, JP;

Takahiro Kudo, Tokyo, JP;

Masato Takahashi, Tokyo, JP;

Nobuhisa Kato, Tokyo, JP;

Kimihiro Nakamura, Tokyo, JP;

Shuji Tsukamoto, Tokyo, JP;

Assignee:

Fuji Electric Co., Ltd., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73718 ; 73724 ;
Abstract

A capacitance-based pressure detecting apparatus detects a pressure applied to a diaphragm based on a capacitance which varies depending on the change in portion of the diaphragm. The pressure detecting apparatus comprises a diaphragm which changes position depending on a differential pressure between a first pressure and a second pressure, a first electrode which is provided opposite a first plane of the diaphragm and forms, together with the diaphragm, a first capacitor, a second electrode which is provided opposite a second plane of the diaphragm and forms, together with the diaphragm, a second capacitor, a third capacitor altering a capacitance according to the first pressure, a detecting unit for detecting the capacitance of the first through third capacitors, and an operation unit for obtaining a pressure applied to the diaphragm based on the capacitance of the first and second capacitors, and amending the obtained pressure based on the capacitance of the third capacitor.


Find Patent Forward Citations

Loading…