The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 1999
Filed:
Feb. 14, 1996
Applicant:
Inventors:
Seok Keun Koh, Seoul, KR;
Hyung Jin Jung, Seoul, KR;
Seok Kyun Song, Seoul, KR;
Won Kook Choi, Seoul, KR;
Dongsoo Choi, Ansan, KR;
Jin Seok Jeon, Ansan, KR;
Assignee:
Korea Gas Corporation, Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
438608 ; 438609 ; 427529 ; 427561 ; 427564 ;
Abstract
The present invention relates to tinoxide thin film, a process for manufacturing thereof comprising the step of depositing tin while providing oxygen or ionized oxygen around a substrate, and relates to a gas detecting sensor prepared by the use of such tinoxide thin film.