The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 1999
Filed:
Oct. 20, 1997
Masakazu Sanada, Kyoto, JP;
Masahiro Mimasaka, Kyoto, JP;
Abstract
A method of applying a coating solution to a surface of a substrate to form a film of desired thickness thereon. The substrate is spun at low speed with a predetermined supplying rotational frequency, and the coating solution is supplied to a region centrally of the substrate. The substrate is decelerated to a predetermined standby rotational frequency lower than the supplying rotational frequency before the coating solution spreads over an entire surface of the substrate. Then, the substrate is accelerated to a target rotational frequency higher than the supplying rotational frequency before the coating solution spreads over the entire surface of the substrate. Subsequently, the substrate is spun at high speed with a predetermined film-forming rotational frequency, thereby coating the surface of the substrate with a film of desired thickness. The supply of the coating solution is continued at least during the deceleration to the standby rotational frequency.