The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 1999
Filed:
Mar. 08, 1996
Applicant:
Inventors:
Hiromi Ohsaki, Kubiki-mura, JP;
Toshinobu Ishihara, Kubiki-mura, JP;
Isao Kaneko, Kubiki-mura, JP;
Kouhei Sato, Kubiki-mura, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
75304 ; 75252 ; 118726 ; 34576 ;
Abstract
A feeder of a solid organometallic compound is obtained by filling a container up to 50-80 vol % of the total capacity of the container with stainless steel support whose pore ratio is adjusted to 50-80 vol % and then also filling it with solid granules of an organometallic compound which is solid at room temperature.