The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 16, 1999

Filed:

Sep. 11, 1997
Applicant:
Inventor:

Muneharu Yamashita, Toyama-ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G01N / ;
U.S. Cl.
CPC ...
324457 ; 324458 ; 324613 ; 324452 ;
Abstract

A surface potential sensor which is less affected by noise superposed on a reference source voltage than prior sensors, and hence can improve measurement accuracy with ease, and which also has higher stability against extraneous noise. The sensor includes an initial-stage input circuit comprising an FET, and a succeeding-stage amplifier circuit mainly comprising an operational amplifier for amplifying a difference between an AC component from the initial-stage input circuit and a reference source voltage. A resistor is connected between a drain of the FET constituting the initial-stage input circuit and a source voltage line to take out a signal from the FET drain. The source voltage supplied to the FET is the reference source voltage.


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