The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1999
Filed:
Apr. 06, 1998
Applicant:
Inventors:
Jonathan B Smith, Fremont, CA (US);
C Bradford Hopper, San Francisco, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427240 ; 4273855 ; 437231 ;
Abstract
Spin-on coatings are applied by ramping-up the exhaust level in the spin coating chamber to achieve a predetermined minimum exhaustion level prior to accelerating rotation of the coating substrate to a high speed to effect spreading of the coating fluid. The resulting spun-on coatings exhibit reduced defect formation and reduced aerosol particle redeposition thereon.