The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1999
Filed:
May. 22, 1998
Applicant:
Inventor:
Hiroshi Yoshino, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03D / ; G03F / ; H01L / ; B01D / ;
U.S. Cl.
CPC ...
396611 ; 422255 ; 553501 ; 55472 ; 396565 ;
Abstract
A resist processing system comprising a resist processing chamber 11, an air filter 14 and an air intake unit 15 for introducing air into the processing chamber 11 through the air filter 14, the air filter 14 having a housing 18 and a diffusion scrubber 19 separating a first space and a second space within the housing 18, the first space having a liquid inlet port 21A and a liquid outlet port 21B for passing a liquid therethrough, the second space having an air inlet port 20A and an air outlet port 20B for passing the air from the air intake unit therethrough.