The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1999
Filed:
Jun. 27, 1997
Applicant:
Inventors:
Roger P Fremgen, Jr, East Northport, NY (US);
John Jacob, Brooklyn, NY (US);
Alan V Hayes, Centerport, NY (US);
Victor Kanarov, Bellemore, NY (US);
Edward W Ostan, Huntington, NY (US);
Abraham J Navy, Bellerose, NY (US);
Emmanuel N Lakios, Mt. Sinai, NY (US);
Genrikh Treyger, Brooklyn, NY (US);
Assignee:
Veeco Instruments, Inc., Plain View, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ; H05H / ;
U.S. Cl.
CPC ...
31511191 ; 31511131 ; 2504 / ; 250424 ;
Abstract
A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam 'on' and beam 'off' states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.