The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1999
Filed:
Dec. 31, 1997
Songcheol Hong, Taejon-shi, KR;
Sookun Jeon, Kunsan-shi, KR;
Korea Advanced Institute of Science & Technology, Taejon-shi, KR;
Abstract
An integrated device having a configuration, in which a cantilever and a light source are integrated on a single substrate, and applicable to a variety of fields, for example, ultra-fine quantity sensors, and a method for fabricating such a device. The light source such as LED, LD or SEL and the cantilever are integrated together on a single substrate in such a manner that they are arranged in proximity because the distance between the light source to the cantilever has no influence on the amplification rate. Accordingly, the device of the present invention requires no additional alignment for its constituting elements. In accordance with this configuration, it is possible to greatly reduce the space occupied by the constituting elements. It is also possible to reduce the limitation on the focusing of light. Since the integrated device of the present invention can accurately measure a micro displacement of the cantilever, it can be applied to micro physical quantity sensors. The device can also be used to measure displacement of a SPM tip. In addition, the device of the present invention may be used to achieve an alignment required in optical devices and LD's.