The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1999
Filed:
Feb. 21, 1997
Applicant:
Inventors:
Kazuo Muramatsu, Kobe, JP;
Akihiro Kawai, Kobe, JP;
Tsutomu Watanabe, Kobe, JP;
Satoshi Shimamoto, Kobe, JP;
Assignee:
Kabushiki Kaisha Kobe Seiko Sho, Kobe, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438-4 ; 438959 ; 438906 ;
Abstract
A method for regenerating a used wafer or substrate by removing a functional coating film formed on the used wafer or substrate, comprising the steps of:
Muramatsu, Kazuo. (1999). Regeneration method and apparatus of wafer and substrate (U.S. Patent No. 5981301). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5981301
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile