The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1999
Filed:
Sep. 11, 1997
Applicant:
Inventor:
Rafael C Alfaro, Carrollton, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B26F / ; H01L / ;
U.S. Cl.
CPC ...
225 93 ; 225-2 ; 225103 ; 225 965 ;
Abstract
An apparatus for breaking a wafer into individual devices. An anvil 100 is pressed against a flexible membrane 304 on which a wafer 300 is attached. A vacuum is applied to the anvil 100 which allows the flexible membrane 304 and the wafer 300 to be pressed against the face of the anvil 100. As the flexible membrane 304 is deformed against the anvil 100, the wafer 300 breaks into individual devices 302. Dicing debris that is created when the wafer 300 is broken falls into a base fixture 408 so that the debris does not contact and damage the devices 302.