The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 1999
Filed:
Mar. 28, 1997
Applicant:
Inventor:
Yutaka Endo, Yokohama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F25D / ;
U.S. Cl.
CPC ...
62179 ; 62185 ; 62441 ; 62333 ;
Abstract
A method and apparatus for cooling different media which separately control the temperature of a plurality of chambers. A common refrigerant is used for cooling the different media.