The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 1999
Filed:
Apr. 13, 1998
Hidekatsu Matsushita, Kyoto, JP;
Matsushita Seiki Co., Ltd., Kyoto, JP;
Abstract
A device enabling an inspector to inspect a surface of a photomask etc. without holding the photomask manually, and enabling him/her not to lose his/her sight of any defect of the surface even if the surface is tilted. The device includes a hemispherical support, with its open side upward, which is supported so as to slidably move along a spherical surface with a point S as its center, an X-Y stage which is fixed onto the hemispherical support, a rotation unit which is mounted onto the X-Y stage, a support plate which is supported onto the rotation unit, a lighting device which lights up a part of a photomask, on the support plate, corresponding to the spot S and its vicinity. The support plate can be tilted about the spot S.