The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 1999
Filed:
Aug. 07, 1995
Applicant:
Inventors:
Fernando A Bello, Scottsdale, AZ (US);
James B Hall, Chandler, AZ (US);
Earl W O'Neal, Scottsdale, AZ (US);
James S Parsons, Scottsdale, AZ (US);
Cindy Welt, Scottsdale, AZ (US);
George W Bailey, Gilbert, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438747 ; 438753 ; 438974 ; 216 38 ; 216 83 ; 216 91 ; 216 99 ;
Abstract
A method for pre-shaping a major surface (21,22) of a semiconductor wafer (20) in preparation for polishing includes shaping the major surface (21,22) so that it has a concave shape. In a preferred method, an etching process is used to form the concave shape. The concave shape provides a starting wafer that is extremely flat after polishing.