The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 1999
Filed:
Oct. 16, 1998
Applicant:
Inventor:
Yuko Seki, Tokyo, JP;
Assignee:
Nec Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
264400 ; 264-137 ;
Abstract
A laser processing method for ablating a transparent material is disclosed. A laser beam absorption layer is formed in a desired ablation portion beforehand by the implantation of an impurity or the increase of a defect density. The absorption layer obviates damage ascribable to thermal strain and, when use is made of a VUV (Vacuum Ultra Violet) beam, damage to portions other than an irradiated portion. This allows a simple apparatus to implement the ablation of a transparent film.