The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 12, 1999

Filed:

Nov. 12, 1997
Applicant:
Inventor:

Akira Inoue, Chiba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250306 ; 2504 / ;
Abstract

A spring is connected to an edge section of a sample side of a spindle receiving a force in the Z-axial direction by a first poise coil motor, and a probe is attached to the tip of the spring. The spindle is supported by an internal tube with a spring. The movement of the spindle is enlarged by the spring to be conveyed to the probe, whereby displacement of the probe is amplified. For this reason, a resonance frequency f0 of a system comprising the movable element of the first poise coil motor, spindle, spring, spring and probe can be increased. If the spring is changed to springs in two stages, a resonance frequency f0 of the system can be increased with comparatively compact configuration.


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