The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 1999
Filed:
Nov. 12, 1997
Applicant:
Inventors:
Iwao Sakai, Tokyo, JP;
Tokuo Mizuno, Tokyo, JP;
Assignee:
JEOL Ltd. and JEOL Engineering Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
313336 ; 313351 ; 3133 / ; 3133 / ;
Abstract
There is disclosed a long-lived thermal field emission electron gun for use in a scanning electron microscope. The gun has a tungsten tip. The surface of this tip is coated with zirconium, zirconium oxide, titanium or titanium oxide. A wire member is mounted above the front end of the tungsten tip to prevent the coating of zirconium or other material from slipping off.