The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 1999
Filed:
Apr. 08, 1997
Fumiyoshi Kirino, Tokyo, JP;
Nagatugu Koiso, Tama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
To obtain a soft magnetic thin film having improved soft magnetic characteristics, thermal stability and corrosion resistance, this invention uses a soft magnetic thin film comprising Fe as the principal component thereof and containing Ta and/or Hf and C and/or N, wherein the (110) plane of Fe is preferentially oriented, the size d.sub.1 of the Fe crystal particle is not greater than 15 nm and the size d.sub.2 of the Ta--C, Ta--N, Hf--C or Hf--N particle is not greater than 3 nm. The crystal particle size is controlled by causing first the Fe crystal particle to precipitate at the initial stage of the film formation and then causing the crystal particle of Ta--C, Ta--N, Hf--C or Hf--N to precipitate.