The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 1999
Filed:
Apr. 27, 1998
Dale R Sogge, Wrentham, MA (US);
Mitchell H Berkson, Providence, RI (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A fluid pressure sensor (10) having a capacitive pressure transducer (12) having a thin, relatively flexible ceramic diaphragm (14) mounted in closely spaced apart relation to a rigid ceramic substrate (16) by a glass annulus (18) mounted in a housing (46) having a port (46a) for fluid whose pressure is to be sensed to be received on an outer face of the diaphragm. An electronic circuit (50) is mounted in a chamber (38) formed between a connector (36) and an outer face (12b) of the substrate. A source capacitor plate (20) and source trace (20b) are printed on the diaphragm and a detect plate (22) and detect trace (22b) are printed on a substrate with a guard plate (28, 28', 28'; 30, 30') printed on both the diaphragm and substrate completely surrounding the source and detect plates and traces.