The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 1999
Filed:
Nov. 06, 1997
Kenneth Raymond Carter, San Jose, CA (US);
Robert Francis Cook, Putnam Valley, NY (US);
Martha Alyne Harbison, Sacramento, CA (US);
Craig Jon Hawker, Los Gatos, CA (US);
James Lupton Hedrick, Pleasanton, CA (US);
Sung-Mog Kim, Taejon, KR;
Eric Gerhard Liniger, Danbury, CT (US);
Robert Dennis Miller, San Jose, CA (US);
Willi Volksen, San Jose, CA (US);
Do Yeung Yoon, Los Gatos, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
The invention relates to a process for making an integrated circuit device comprising (I) a substrate, (ii) metallic circuit lines positioned on the substrate, and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises the condensation product of silsesquioxane precursor in the presence of an organic amine having a boiling point greater than 150.degree. C.