The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 1999

Filed:

May. 20, 1996
Applicant:
Inventors:

Jose Avelino Delgado, Valkaria, FL (US);

Stephen Joseph Gaul, Merrimack, NH (US);

Assignee:

Harris Corporation, Palm Bay, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
257776 ; 257276 ; 257226 ; 257522 ; 257622 ; 257758 ; 257680 ; 438624 ; 438619 ;
Abstract

A handle wafer has a cavity coated with a dielectric. A device wafer is bonded to the handle wafer. Metal lines, devices or circuits fabricated on device layer overlay the cavity in the handle wafer thus reducing parasitic capacitances to the handle wafer and crosstalk through the handle wafer. This constitutes a rugged air bridge structure capable of being passivated and/or being placed in plastic packages.


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