The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1999
Filed:
Jun. 30, 1997
Applicant:
Inventor:
Satoru Mizouchi, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
359618 ; 359619 ; 359628 ; 362259 ; 362268 ; 355 67 ;
Abstract
An illumination optical system includes a light source which produces a light beam, the light beam having an anisotropic coherence, with a high coherence direction and a low coherence direction, and an optical integrator, which includes a plurality of lens elements upon which the light beam is incident. The plurality of lens elements each include an opening having a long direction and a short direction. The long direction of each of the plurality of lens elements is aligned with the high coherence direction of the light beam, and the short direction of each of the plurality of lens elements is aligned with the low coherence direction of the light beam.