The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1999
Filed:
Feb. 09, 1998
Takashi Hosoi, Wako, JP;
Satoshi Hiyama, Wako, JP;
Sukeyuju Shinotuka, Wako, JP;
Mizuho Doi, Wako, JP;
Hiroshi Yamakawa, Wako, JP;
Nariaki Kuriyama, Wako, JP;
Tomoyuki Nishio, Wako, JP;
Atsushi Inaba, Wako, JP;
Nobuhiro Fueki, Wako, JP;
Honda Giken Kogyo Kabushiki Kaisha, Tokyo, JP;
Abstract
A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.