The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1999
Filed:
Jun. 09, 1997
Applicant:
Inventors:
Larry Bruce Fritzinger, Orlando, FL (US);
Taeho Kook, Orlando, FL (US);
Kuo-Hua Lee, Orlando, FL (US);
Assignee:
Lucent Technologies Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438734 ; 438743 ;
Abstract
A novel process for forming a window, illustratively, an emitter window BiCMOS process is disclosed. An anisotropic etch followed by an isotropic etch to open the window is disclosed. The isotropic etch prevents contamination of the substrate by the anisotropic etching process.