The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1999
Filed:
Apr. 28, 1998
Dong-Kyu Kim, Kyungki-do, KR;
Jung-Hee Lee, Kyungki-do, KR;
Abstract
A substrate for a microelectronic device is divided into at least two regions and a boundary region therebetween. The boundary region includes a first portion and a second portion. The boundary region may have subregions having equal area, and the sub-regions are arranged in a matrix shape to form the first portion and the second portion A photoresist is coated on the substrate. Portions of the photoresist on the first region and the first portion is exposed to light through a mask for photolithography, and other portions of the photoresist on the second region and the second portion is then exposed to light through the mask. The area of the sub-regions of the first portion in a column becomes larger as goes to the first region, while that of the second portion becomes smaller.