The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1999
Filed:
Jul. 11, 1997
A. G. Associates (Israel) Ltd., Migdal Haemek, IL;
Abstract
Apparatus for measuring the temperature of workpieces, particularly semiconductor wafers, during their processing, including a head assembly having a head plate circumscribed by a raised rim for receiving the workpiece and for spacing it from the head plate to define an enclosed volume between the head plate, rim, and workpiece; a thermally-conductive member, e.g., an optical fiber, passing through the head assembly and having one end exposed to the enclosed volume such that it receives thermal radiation therefrom; and a thermal detector aligned with the opposite end of the thermally-conductive member for detecting the thermal radiation received by it from the enclosed volume and for converting same to an electrical signal representing a measurement of the temperature of the enclosed volume.