The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 1999
Filed:
Dec. 15, 1997
Applicant:
Inventor:
E S Ramakrishnan, Coral Springs, FL (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G / ; H01F / ;
U.S. Cl.
CPC ...
438381 ; 438393 ; 29 2542 ; 361322 ;
Abstract
High dielectric constant capacitors and/or inductors are formed on a substrate by depositing an amorphous layer (10) of a metal oxide on the substrate (12). A pattern is formed in the metal oxide by wet or dry etching to remove portions (17) of the amorphous material so that only portions (18) of the substrate remain covered. This pattern subsequently becomes the dielectric portion of the capacitor or the inductor. The patterned amorphous layer of metal oxide is then heated under conditions sufficient to convert it from amorphous to crystalline (16), thus increasing the dielectric constant.