The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 1999
Filed:
Sep. 18, 1996
Applicant:
Inventor:
Masaru Sanada, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
371 271 ; 324751 ;
Abstract
In a semiconductor device, a plurality of functional test patterns are generated and transmitted to the semiconductor device, and it is determined whether or not an abnormal current, flows through the semiconductor device. Also, the semiconductor device is irradiated with electrons, and secondary electrons from the semiconductor device are detected. Potential contrast images are calculated in accordance with the detected secondary electrons in response to the functional test patterns. A logic operation is performed upon the potential contrast images to estimate a fault point.