The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 1999
Filed:
Dec. 19, 1996
Klaus-Dieter Rinnen, Palo Alto, CA (US);
Cory Czarnik, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A computer-implemented method of achieving inter-chamber synchronization in a system for integrated circuit manufacturing that includes first and second chambers. In particular, the disclosed method includes terminating a second operation in a second recipe carried out in the second chamber, upon termination of a first operation in a first recipe carried out in the first chamber. Performance advantages realized by the method are illustrated for various cases including 1) a variable-length first operation; 2) a fixed-length first operation; 3) a process first recipe; 4) a conditioning first recipe; 5) a process second recipe; and 6) a conditioning second recipe.