The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
Oct. 16, 1996
Applicant:
Inventor:
Kuo-Chang Wu, Taichung, TW;
Assignee:
Vanguard International Semiconductor Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
438640 ; 438637 ; 438639 ; 438672 ; 438701 ; 438733 ; 216 58 ; 257756 ;
Abstract
The present invention provides a method of forming a tapered polysilicon contact plug having reduced dimensions beyond the normal resolution limit of a photolithographic method by utilizing at least one polysilicon sidewall spacer as a mask in an anisotropic etching process of an oxide layer such that a contact window of reduced dimensions can be formed for the subsequent deposition of a heavily-doped polysilicon for forming the contact plug.