The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
May. 08, 1997
Hiroji Ozaki, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
Measurement result data obtained by the devices (A1 to A8) are stored in databases (C1 to C8). Every time new data are entered in any of the databases (C1 to C8), a database monitoring computer (E1) retrieves data related to the entered data from the data stored in the databases (C1 to C8) and stores the retrieved data in a failure analysis database (D3). A data analysis system (D0) gives a readout from the failure analysis database (D3) to an operator. The operator can thereby judge that some nonconforming defect is found and what the cause of nonconforming defect is even while the product wafer is on a fabrication line, to make a prompt remedy against the cause of nonconforming defect. Thus, a method and an apparatus for analyzing a fabrication line can be provided, allowing a prompt remedy against the cause of nonconforming defect.